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DVH Group Sputtering lab
Two UHV chambers equipped with a total of 5 sputtering guns, 2 rf- and 3 dc-, 2 ion-mills and an electron beam evaporator. One of the chambers is dedicated for making Nb trilayers for SQUIDs, the other one is a multipurpose chamber, currently used for S-F-S Josephson junction fabrication. DVH Research Group, 1996-2005 University of Illinois at Urbana-Champaign |
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